The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2009

Filed:

Nov. 07, 2006
Applicants:

Dae-jin Kwon, Gyeonggi-do, KR;

Jung-min Park, Gyeonggi-do, KR;

Seok-jun Won, Seoul, KR;

Min-woo Song, Gyeonggi-do, KR;

Weon-hong Kim, Gyeonggi-do, KR;

Ju-youn Kim, Gyeonggi-do, KR;

Inventors:

Dae-Jin Kwon, Gyeonggi-do, KR;

Jung-Min Park, Gyeonggi-do, KR;

Seok-Jun Won, Seoul, KR;

Min-Woo Song, Gyeonggi-do, KR;

Weon-hong Kim, Gyeonggi-do, KR;

Ju-youn Kim, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
Abstract

Integrated circuit devices including metal-insulator-metal (MIM) capacitors are provided. The MIM capacitors may include an upper electrode having first and second layers. The first layer of the upper electrode includes a physical vapor deposition (PVD) upper electrode and the second layer of the upper electrode includes an ionized PVD (IPVD) upper electrode on the PVD upper electrode. Related methods are also provided.


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