The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Aug. 25, 2006
Markus Ulm, Wannweil, DE;
Brian Stark, Los Altos, CA (US);
Matthias Metz, Palo Alto, CA (US);
Tino Fuchs, Tubingen, DE;
Franz Laermer, Wailderstadt, DE;
Silvia Kronmueller, Schwaikheim, DE;
Markus Ulm, Wannweil, DE;
Brian Stark, Los Altos, CA (US);
Matthias Metz, Palo Alto, CA (US);
Tino Fuchs, Tubingen, DE;
Franz Laermer, Wailderstadt, DE;
Silvia Kronmueller, Schwaikheim, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.