The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Nov. 03, 2005
Applicants:
Thomas L. Koch, Califon, NJ (US);
Robert M. Pafchek, Blandon, PA (US);
Mark A. Webster, Bethlehem, PA (US);
Inventors:
Thomas L. Koch, Califon, NJ (US);
Robert M. Pafchek, Blandon, PA (US);
Mark A. Webster, Bethlehem, PA (US);
Assignee:
Lehigh University, Bethlehem, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a method of fabricating an optical waveguide device including the steps of forming a mask over a waveguide core material layer so as to leave a portion of the layer exposed, and exposing the structure to an oxidizing environment to form an oxide layer on the waveguide core material layer at least in the exposed portion thereby defining the lateral dimension of the waveguide core. The resulting waveguide core has extremely smooth surfaces for low optical losses.