The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Jun. 28, 2004
Yezdi Dordi, Palo Alto, CA (US);
Bob Maraschin, Cupertino, CA (US);
John Boyd, Atascadero, CA (US);
Fred C. Redeker, Fremont, CA (US);
Yezdi Dordi, Palo Alto, CA (US);
Bob Maraschin, Cupertino, CA (US);
John Boyd, Atascadero, CA (US);
Fred C. Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An electroplating head including a chamber having a fluid entrance and a fluid exit is provided. The chamber is configured to contain a flow of electroplating solution from the fluid entrance to the fluid exit. The electroplating head also includes an anode disposed within the chamber. The anode is configured to be electrically connected to a power supply. The electroplating head further includes a porous resistive material disposed at the fluid exit such that the flow of electroplating solution is required to traverse through the porous resistive material.