Semiconductor integrated circuit device with internal power control system

Abstract

One object of the present invention is to provide an LSI that can dynamically perform appropriate adjustment for a power voltage to be supplied to an internal circuit, not only at the time of the occurrence of the initial change of a performance due to a variation or variety factors through a manufacturing process, but also at the time of the occurrence of the time elapsed change. An LSIincludes a semiconductor substrate, a ring oscillatorformed on the semiconductor substrateand for outputting a monitoring clock signal MCLK having a frequency that depends on a manufacturing process, an internal circuitformed on the semiconductor substrate; a frequency comparison circuitfor comparing the monitoring the clock signal MCLK with a reference clock signal RCLK having a predetermined frequency, and for outputting a differential signal DIF corresponding to the difference between the frequencies; and an internal power supply circuitfor supplying an internal power voltage IVDD to the internal circuitcorresponding to the differential signal DIF that is outputted by the frequency comparison circuit