The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Dec. 02, 2003
Anthony Vesci, San Jose, CA (US);
Alan B. Liu, Mountain View, CA (US);
Donny Young, San Francisco, CA (US);
Joe F. Sommers, San Jose, CA (US);
Kevin Hughes, San Jose, CA (US);
Anthony Vesci, San Jose, CA (US);
Alan B. Liu, Mountain View, CA (US);
Donny Young, San Francisco, CA (US);
Joe F. Sommers, San Jose, CA (US);
Kevin Hughes, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans together with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0.064 mm.