The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Jan. 18, 2006
Mitsutaka Hikita, Hachioji, JP;
Nobuhiko Shibagaki, Kokubunji, JP;
Atsushi Isobe, Kodaira, JP;
Kengo Asai, Hachioji, JP;
Hisanori Matsumoto, Kokubunji, JP;
Mitsutaka Hikita, Hachioji, JP;
Nobuhiko Shibagaki, Kokubunji, JP;
Atsushi Isobe, Kodaira, JP;
Kengo Asai, Hachioji, JP;
Hisanori Matsumoto, Kokubunji, JP;
Hitachi Media Electronics Co., Ltd., Mizusawa-Shi Iwate-ken, JP;
Abstract
A piezoelectric thin film resonator is formed on a base substrate such as made of Si in which the resonance frequency is substantially determined by the lateral size not by the thickness of the resonator, whereby a resonator for use in TCXO, etc. is provided by the thin film technique, which enables to reduce the thickness of the film and the size of the resonator and integration with Si-based IC incorporating the resonator in one identical substrate.