The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Feb. 16, 2007
Kenya Sano, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Ryoichi Ohara, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Kenya Sano, Kawasaki, JP;
Kazuhiko Itaya, Yokohama, JP;
Ryoichi Ohara, Kawasaki, JP;
Takashi Kawakubo, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the substrate and disposed in a peripheral region of the cavity, and having a thickness larger than the first dielectric layer; a first electrode provided on the first dielectric layer and above the cavity; a piezoelectric layer provided on the first electrode and disposed to extend to a region on the second dielectric layer; and a second electrode provided on the piezoelectric layer and above the first electrode.