The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Mar. 22, 2004
Edvard Kälvesten, Hägersten, SE;
Thorbjörn Ebefors, Huddinge, SE;
Niklas Svedin, Stockholm, SE;
Pelle Rangsten, Storvreta, SE;
Tommy Schönberg, Tyresö, SE;
Edvard Kälvesten, Hägersten, SE;
Thorbjörn Ebefors, Huddinge, SE;
Niklas Svedin, Stockholm, SE;
Pelle Rangsten, Storvreta, SE;
Tommy Schönberg, Tyresö, SE;
Silex Microsystems AG, Jarfalla, SE;
Abstract
A method of making an electrical connection between a first (top) and a second (bottom) surface of a conducting or semi-conducting substrate includes creating a trench in the first surface, and establishing an insulating enclosure entirely separating a portion of the substrate, defined by the trench. Also described is a product usable as a starting substrate for the manufacture of micro-electronic and/or micro-mechanic devices, including a flat substrate of a semi-conducting or conducting material, and having a first and a second surface and at least one electrically conducting member extending through the substrate. The electrically conducting member is insulated from surrounding material of the flat substrate by a finite layer of an insulating material, and includes the same material as the substrate, i.e. it is made from the wafer material.