The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2009

Filed:

Oct. 13, 2005
Applicants:

Yukio Sato, Tokyo, JP;

Susumu Shibata, Nagoya, JP;

Inventors:

Yukio Sato, Tokyo, JP;

Susumu Shibata, Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01); H01J 40/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a matrix of light detectors forming a part of a three-dimensional measurement sensor, outputs of light detectors belonging to a same row are connected to a common signal line. An output of each light detector is read, through scanning by the horizontal scan circuit, to the signal line from left to right in order, during a horizontal scan period which is sufficiently short such that slit light of a light-sectioning method can be assumed to be substantially stationary. A position detector determines a time from start of the horizontal scan period until detection of a maximum peak of a signal in the signal line. The time indicates a distance from an end of the row from which scanning is started to the light detector detecting the peak of the slit light. A recording processor records a value of a distance determined by the position detector in correspondence to a value of a counter indicating a projection angle of the slit angle.


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