The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Jul. 14, 2003
Applicants:
Shunsuke Sato, Kakogawa, JP;
Naoki Koda, Kakogawa, JP;
Shunsuke Fukutomi, Kakogawa, JP;
Takashi Shirai, Kakogawa, JP;
Inventors:
Shunsuke Sato, Kakogawa, JP;
Naoki Koda, Kakogawa, JP;
Shunsuke Fukutomi, Kakogawa, JP;
Takashi Shirai, Kakogawa, JP;
Assignee:
Daishinku Corporation, Hyogo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A tuning-fork crystal waferA which has legswith groovesis shaped by etching of a crystal substrate. To improve processing precision of the depth of the grooves, the width of the groovesis set in advance, based on the etch stop technique in which the amount of etching depends on the pattern of an etch portion. Consequently, as far as the etch time satisfies a required minimum time, it is possible to obtain the depth as designed.