The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2009
Filed:
Jan. 08, 2008
Applicants:
Masahiro Sugiura, Hamamatsu, JP;
Kunio Hiyama, Hamamatsu, JP;
Susumu Ogino, Iwata, JP;
Inventors:
Assignee:
Yamaha Corporation, Shizuoka-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 3/02 (2006.01); H05K 3/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a probe unit includes: (a) preparing a substrate; (b) forming a hollow part in the substrate; (c) forming a sacrificial layer that buries the hollow part on the substrate; (d) forming a first layer on the substrate, wherein one end of the first layer is positioned on the sacrificial layer; (e) forming a second layer on the first layer at least excepting the one end; and (f) removing the sacrificial layer.