The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2009

Filed:

Oct. 19, 2007
Applicants:

Takanori Ninomiya, Hiratsuka, JP;

Seiji Isogai, Hitachinaka, JP;

Shigeru Matsui, Hitachinaka, JP;

Toshiei Kurosaki, Hitachinaka, JP;

Inventors:

Takanori Ninomiya, Hiratsuka, JP;

Seiji Isogai, Hitachinaka, JP;

Shigeru Matsui, Hitachinaka, JP;

Toshiei Kurosaki, Hitachinaka, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 (2006.01); G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.


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