The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Mar. 29, 2007
Chung-ho Huang, San Jose, CA (US);
Robert Hefty, Femont, CA (US);
Andrew Lui, Fremont, CA (US);
Dave Humbird, Oakland, CA (US);
Charles Potter, Eagle, ID (US);
Chung-Ho Huang, San Jose, CA (US);
Robert Hefty, Femont, CA (US);
Andrew Lui, Fremont, CA (US);
Dave Humbird, Oakland, CA (US);
Charles Potter, Eagle, ID (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.