The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Apr. 19, 2005
Jonathan Doan, Mountain View, CA (US);
Regis Grasser, Mountain View, CA (US);
Satyadev Patel, Sunnyvale, CA (US);
Andrew Huibers, Palo Alto, CA (US);
Igor Volfman, Sunnyvale, CA (US);
Jonathan Doan, Mountain View, CA (US);
Regis Grasser, Mountain View, CA (US);
Satyadev Patel, Sunnyvale, CA (US);
Andrew Huibers, Palo Alto, CA (US);
Igor Volfman, Sunnyvale, CA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.