The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Mar. 27, 2008
Naoki Oda, Tokyo, JP;
Susumu Komiyama, Tokyo, JP;
Iwao Hosako, Tokyo, JP;
NEC Corporation, Tokyo, JP;
The University of Tokyo, Tokyo, JP;
National Institute of Information and Communications Technology, Tokyo, JP;
Abstract
In a bolometer-type THz-wave detectorin a micro-bridge structure in which a temperature detecting portion(diaphragm) including a bolometer thin filmis supported by a supporting portionin a state suspended from a circuit substrate, a member (dielectric cover) made of a dielectric material for efficiently collecting a THz wave is added to an upper part of the temperature detecting portion, and when a refractive index of the dielectric coveris n, thickness is t, and a wavelength of the THz wave is λ, a setting is made so as to have at >λ, and a gap between the dielectric coverand the temperature detecting portionis set at integral multiples of λ/2. By this arrangement, an absorptance of the THz wave can be improved using a structure and manufacturing method of a bolometer-type infrared detector, and a high-performance bolometer-type THz-wave detector can be manufactured with a high yield.