The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Nov. 08, 2006
Applicants:
Seung-bum Kim, Ichon-shi, KR;
Ki-won Nam, Ichon-shi, KR;
Inventors:
Seung-Bum Kim, Ichon-shi, KR;
Ki-Won Nam, Ichon-shi, KR;
Assignee:
Hynix Semiconductor Inc., Kyoungki-do, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for fabricating a recess gate in a semiconductor device is provided. The method includes selectively etching an active region of a substrate to form a recess pattern, performing a post treatment on the recess pattern using a plasma, and forming a gate pattern in the recess pattern.