The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Sep. 30, 2003
Applicants:
Leonard J. Olmer, Orlando, FL (US);
Robert F. Jones, Clermont, FL (US);
William D. Bevers, Orlando, FL (US);
Edward P. Martin, Jr., Orlando, FL (US);
Inventors:
Leonard J. Olmer, Orlando, FL (US);
Robert F. Jones, Clermont, FL (US);
William D. Bevers, Orlando, FL (US);
Edward P. Martin, Jr., Orlando, FL (US);
Assignee:
Agere Systems Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 6/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for cleaning the silicon surface of a semiconductor device material layer. The surface undergoes a pre-clean process followed by exposure to a nitrogen-containing gas. A polysilicon layer is formed on the surface in the same chamber and at about the same temperature as the cleaning and nitrogen exposing steps.