The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2009

Filed:

Sep. 19, 2007
Applicants:

Igor Bargatin, Pasadena, CA (US);

Jessica L. Arlett, Pasadena, CA (US);

Michael L. Roukes, Pasadena, CA (US);

Inna Kozinsky, Pasadena, CA (US);

John Sequoyah Aldridge, Carlsbad, CA (US);

Edward B. Myers, Sherman Oaks, CA (US);

Inventors:

Igor Bargatin, Pasadena, CA (US);

Jessica L. Arlett, Pasadena, CA (US);

Michael L. Roukes, Pasadena, CA (US);

Inna Kozinsky, Pasadena, CA (US);

John Sequoyah Aldridge, Carlsbad, CA (US);

Edward B. Myers, Sherman Oaks, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 19/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.


Find Patent Forward Citations

Loading…