The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Nov. 17, 2003
Nobuo Takeshita, Tokyo, JP;
Teruo Fujita, Tokyo, JP;
Toshiya Matozaki, Tokyo, JP;
Michihiro Tadokoro, Tokyo, JP;
Nobuo Takeshita, Tokyo, JP;
Teruo Fujita, Tokyo, JP;
Toshiya Matozaki, Tokyo, JP;
Michihiro Tadokoro, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A light wavefront measuring apparatus () includes a separating element () for separating a flux of light which exits from an optical head () into a first beam and a second beam, a first interference fringe display section () for displaying interference fringes formed from the first beam, a Dove prism () for rotating a wavefront of the second beam around its optical axis (AX), and a second interference fringe display section () for displaying interference fringes formed from the second beam which passed through it. In adjustment of the light source device, position of a collimator () in the optical head () is adjusted in optical axis direction so as to approximate the interference fringe patterns displayed in the interference fringe display sections () each other.