The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Feb. 02, 2007
Joo-ho Lee, Yongin-si, KR;
Hae-seok Park, Yongin-si, KR;
Myeong-kwon Gu, Yongin-si, KR;
Jae-shik Shin, Yongin-si, KR;
In-sang Song, Yongin-si, KR;
Kwang-jae Shin, Yongin-si, KR;
Joo-ho Lee, Yongin-si, KR;
Hae-seok Park, Yongin-si, KR;
Myeong-kwon Gu, Yongin-si, KR;
Jae-shik Shin, Yongin-si, KR;
In-sang Song, Yongin-si, KR;
Kwang-jae Shin, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A resonator includes a substrate, and a resonating unit formed on the substrate, and having a lower electrode, a piezoelectric film, and an upper electrode. The lower electrode is formed of at least two layers to adjust a piezoelectric coupling coefficient. The lower electrode includes a first electrode layer and a second electrode layer, which have crystallographic characteristics, particularly, grain sizes or surface roughnesses Ra, different from each other, respectively. The first and the second electrode layers are formed to have a predetermined thickness ratio to each other.