The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2009

Filed:

May. 03, 2005
Applicants:

Timothy Clark Reiley, San Jose, CA (US);

Timothy Carl Strand, San Jose, CA (US);

Inventors:

Timothy Clark Reiley, San Jose, CA (US);

Timothy Carl Strand, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

An ohmic contact for a silicon slider body is disclosed. A scanned laser beam locally heats a metal film on the slider body to interdiffuse the metal and silicon while minimizing the total thermal load on the slider body. This localized heating avoids thermal damage to the sensitive magnetic head region on the slider. The native oxide layer on the slider is removed by a sputter etch, followed by deposition of a diffusion layer. A capping layer is then deposited to reduce oxidation during subsequent processing. The metal layer is then locally annealed by scanning the laser beam over the target area. Contact resistance of less than 100 ohms is achieved while minimizing the thermal load on the slider body.


Find Patent Forward Citations

Loading…