The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Jul. 26, 2006
Tadahiro Ohmi, Sendai-shi, Miyagi, JP;
Nobukazu Ikeda, Osaka, JP;
Yukio Minami, Osaka, JP;
Kouji Kawada, Osaka, JP;
Katunori Komehana, Osaka, JP;
Teruo Honiden, Osaka, JP;
Touru Hirai, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Toshirou Nariai, Osaka, JP;
Keiji Hirao, Osaka, JP;
Masaharu Taguchi, Osaka, JP;
Osamu Nakamura, Osaka, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi, JP;
Nobukazu Ikeda, Osaka, JP;
Yukio Minami, Osaka, JP;
Kouji Kawada, Osaka, JP;
Katunori Komehana, Osaka, JP;
Teruo Honiden, Osaka, JP;
Touru Hirai, Osaka, JP;
Akihiro Morimoto, Osaka, JP;
Toshirou Nariai, Osaka, JP;
Keiji Hirao, Osaka, JP;
Masaharu Taguchi, Osaka, JP;
Osamu Nakamura, Osaka, JP;
Fujikin Incorporated, Osaka-shi, JP;
Other;
Abstract
A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.