The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Apr. 17, 2007
Panos Datskos, Knoxville, TN (US);
Panos Datskos, Knoxville, TN (US);
UT-Battelle, LLC, Oak Ridge, TN (US);
Abstract
A nanomechanical (NEMS) gyroscope includes an integrated circuit substrate, a pair of spaced apart contact pads disposed on the substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling the contact pads. The movable element experiences movement comprising rotation, changes in rotation, or oscillation upon the gyroscope experiencing angular velocity or angular acceleration. Movement of the gyro introduces geometrically induced phase changes which results in phase and/or frequency changes in ac current flowing through the movable element. An inertial measurement unit (IMU) can include an integrated circuit substrate having a three axis gyroscope formed on the substrate and a three axis accelerometer, which is preferably formed on the same substrate.