The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Mar. 31, 2008
Gernot Brasen, Jr., Mainz, DE;
Christian Laue, Mainz, DE;
Matthias Loeffler, Eisenberg, DE;
Heiko Theuer, Mainz, DE;
Gernot Brasen, Jr., Mainz, DE;
Christian Laue, Mainz, DE;
Matthias Loeffler, Eisenberg, DE;
Heiko Theuer, Mainz, DE;
International Business Machines Corporation, Armonk, NY (US);
Abstract
The invention relates to an interferometric method for measuring a height of a first region on a first surface, the first surface having first areas having first optical properties and second areas having second optical properties, the method comprising the steps of generating of first and second coherent light beams, reflecting at least the first coherent light beam from the first region into a first return beam and reflecting the second coherent light beam from a second region into a second return beam, measuring at least a first reflectivity of the first region, determining a topography-dependent phase shift of the first and second return beams for the height measurement based on the first reflectivity.