The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Apr. 27, 2006
Applicant:
Martin Kerber, Munich, DE;
Inventor:
Martin Kerber, Munich, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 27/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor wafer includes a dielectric test structure including a voltage line, a control line, and a plurality of test devices connected in parallel to the voltage line and the control line. Each test device includes a voltage-controlled resistor connected to the control line and a dielectric device, the dielectric device being connected to the voltage line via the voltage-controlled resistor. A method for dielectric reliability testing and forming an integrated circuit product is also provided, as is a wafer with a control voltage pad and an integrated circuit product.