The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2009
Filed:
Aug. 30, 2005
Jeffrey Scott Thompson, Wilmington, DE (US);
Alexander Zak Bradley, Drexel Hill, PA (US);
Kyung-ho Park, Wilmington, DE (US);
Jeffrey Scott Thompson, Wilmington, DE (US);
Alexander Zak Bradley, Drexel Hill, PA (US);
Kyung-Ho Park, Wilmington, DE (US);
E.I du Pont de Nemours and Company, Wilmington, DE (US);
Abstract
Methods of depositing a copper film onto the surface of a substrate from a supercritical solution containing copper-containing precursors having monoanionic bidentate and neutral monodentate ligands, which comprise contacting the substrate with the solution; heating the substrate to a temperature between about 60° C. and less than 150° C.; and forming a copper-containing film on at least a portion of the substrate surface. Also provided are copper-containing precursor compositions used therein.