The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2009
Filed:
Jun. 19, 2006
Hao-seok Park, Yongin-si, KR;
Joo-ho Lee, Seoul, KR;
Byeoung-ju Ha, Seongnam-si, KR;
Seog-woo Hong, Yongin-si, KR;
Hyung Choi, Seongnam-si, KR;
In-sang Song, Seoul, KR;
Hao-seok Park, Yongin-si, KR;
Joo-ho Lee, Seoul, KR;
Byeoung-ju Ha, Seongnam-si, KR;
Seog-woo Hong, Yongin-si, KR;
Hyung Choi, Seongnam-si, KR;
In-sang Song, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.