The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2009

Filed:

May. 18, 2006
Applicants:

Bruno Borovic, Sunnyvale, CA (US);

Frank L. Lewis, Arlington, TX (US);

Ai Qun Liu, Singapore, SG;

Dan O. Popa, Euless, TX (US);

Inventors:

Bruno Borovic, Sunnyvale, CA (US);

Frank L. Lewis, Arlington, TX (US);

Ai Qun Liu, Singapore, SG;

Dan O. Popa, Euless, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.


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