The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2009

Filed:

Jan. 16, 2007
Applicants:

Olivier Kermarec, Gieres, FR;

Yves Campidelli, Grenoble, FR;

Guillaume Pin, Grenoble, FR;

Inventors:

Olivier Kermarec, Gieres, FR;

Yves Campidelli, Grenoble, FR;

Guillaume Pin, Grenoble, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/036 (2006.01);
U.S. Cl.
CPC ...
Abstract

The process relates to the production of a layer of a single-crystal first material on a second material. The second material has at least one aperture exposing a surface portion of a single-crystal third material. The process generally includes forming an at least partially crystalline first layer of said first material on said surface portion of the third material. Then, an amorphous or partially crystalline second layer of the first material is formed on the at least partially crystalline first layer of the first material and on one part of the second material that is around said aperture. Finally, the process includes recrystallization annealing of the first material. Thus, it is possible to produce, within one and the same wafer, either transistors on a germanium-on-insulator substrate with transistors on a silicon-on-insulator substrate, or transistors on a germanium-on-insulator substrate with transistors on a silicon substrate.


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