The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2009
Filed:
Mar. 28, 2005
Tetsuya Yoshida, Kakogawa, JP;
Akira Ukita, Nishinomiya, JP;
Tetsuya Yoshida, Kakogawa, JP;
Akira Ukita, Nishinomiya, JP;
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Abstract
A robot handhaving a hand bodyhaving a reference axis Jis provided with fixed holding membersandand a movable holding memberThe holding membersandare arranged on the hand body at angular intervals about the reference axis J. Each of the fixed holding membersandhas a first guide partand a second guide partdefining a V-shaped groove. The movable holding memberhas a first guide partand a second guide partdefining a V-shaped groove. Peripheral partsof a waferare fit in the V-shaped grooves of the holding memberstoto grip the waferby the robot hand. The first guide partsandare provided at their lower ends with protrusionsandprotruding toward the reference axis J, respectively. The protrusionsandprevent the waferfrom slipping off the holding membersto