The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2009
Filed:
Nov. 09, 2006
Jong-seok Kim, Hwaseong-si, KR;
In-sang Song, Seoul, KR;
Sang-hun Lee, Seoul, KR;
Sang-wook Kwon, Seongnam-si, KR;
Chang-seung Lee, Yongin-si, KR;
Young-tack Houng, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Jong-seok Kim, Hwaseong-si, KR;
In-sang Song, Seoul, KR;
Sang-hun Lee, Seoul, KR;
Sang-wook Kwon, Seongnam-si, KR;
Chang-seung Lee, Yongin-si, KR;
Young-tack Houng, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.