The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2009

Filed:

May. 30, 2007
Applicants:

Shinji Taniguchi, Kawasaki, JP;

Tsuyoshi Yokoyama, Kawasaki, JP;

Motoaki Hara, Kawasaki, JP;

Takeshi Sakashita, Kawasaki, JP;

Jun Tsutsumi, Kawasaki, JP;

Masafumi Iwaki, Kawasaki, JP;

Tokihiro Nishihara, Kawasaki, JP;

Masanori Ueda, Kawasaki, JP;

Hisanori Ehara, Yokohama, JP;

Inventors:

Shinji Taniguchi, Kawasaki, JP;

Tsuyoshi Yokoyama, Kawasaki, JP;

Motoaki Hara, Kawasaki, JP;

Takeshi Sakashita, Kawasaki, JP;

Jun Tsutsumi, Kawasaki, JP;

Masafumi Iwaki, Kawasaki, JP;

Tokihiro Nishihara, Kawasaki, JP;

Masanori Ueda, Kawasaki, JP;

Hisanori Ehara, Yokohama, JP;

Assignees:

Fujitsu Media Devices Limited, Yokohama, JP;

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/00 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.


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