The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2009
Filed:
Oct. 14, 2005
Applicants:
Ju-yong Kim, Suwon-si, KR;
Ho-jin Kweon, Suwon-si, KR;
Jae-jeong Kim, Seoul, KR;
Jin-goo Ahn, Suwon-si, KR;
Oh-joong Kwon, Cheonan-si, KR;
Inventors:
Ju-Yong Kim, Suwon-si, KR;
Ho-Jin Kweon, Suwon-si, KR;
Jae-Jeong Kim, Seoul, KR;
Jin-Goo Ahn, Suwon-si, KR;
Oh-Joong Kwon, Cheonan-si, KR;
Assignees:
Samsung SDI Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Seoul National University Industry Foundation, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device comprises a multi-layered thin film having excellent adhesion due to the method of fabricating the same. More particularly, the device includes a multi-layered thin film consisting of a tantalum nitride layer, a tantalum layer formed on the tantalum nitride layer, and a gold thin film formed on the tantalum layer.