The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Jun. 02, 2008
Aleksander Owczarz, San Jose, CA (US);
Jaroslaw W. Winniczek, Daly City, CA (US);
Luai Nasser, Union City, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fred C. Redeker, Alameda, CA (US);
Erik Edelberg, Castro Valley, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Jaroslaw W. Winniczek, Daly City, CA (US);
Luai Nasser, Union City, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fred C. Redeker, Alameda, CA (US);
Erik Edelberg, Castro Valley, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.