The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2009

Filed:

Mar. 07, 2005
Applicants:

Andrew William Tudhope, Danville, CA (US);

William John Boardman, Colorado Springs, CO (US);

Raul Donate Mercado, Danville, CA (US);

Frederick Contreras, Livermore, CA (US);

Inventors:

Andrew William Tudhope, Danville, CA (US);

William John Boardman, Colorado Springs, CO (US);

Raul Donate Mercado, Danville, CA (US);

Frederick Contreras, Livermore, CA (US);

Assignee:

Sub-One Technology, Inc., Pleasanton, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/441 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and system for coating the internal surfaces of a workpiece is presented. A bias voltage is connected to a workpiece, which functions as a cathode. A gas source and a vacuum source are coupled to each opening through a flow control system. The flow control system is capable of a first mode which enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. The flow control system also has a second mode which enables a first opening to function as a vacuum exhaust and a second opening to function as a gas inlet. The cycling may also be used to coat internal surfaces of a workpiece with a single opening. Cycling the flow control system between the first mode and second mode is performed until a uniform coating along the internal surfaces of the workpiece is achieved.


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