The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Mar. 16, 2006
Anh Tuan Nguyen, Kawasaki, JP;
Tadashi Nakatani, Kawasaki, JP;
Takeaki Shimanouchi, Kawasaki, JP;
Masahiko Imai, Kawasaki, JP;
Satoshi Ueda, Kawasaki, JP;
Anh Tuan Nguyen, Kawasaki, JP;
Tadashi Nakatani, Kawasaki, JP;
Takeaki Shimanouchi, Kawasaki, JP;
Masahiko Imai, Kawasaki, JP;
Satoshi Ueda, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.