The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Oct. 03, 2006
Jun Hee Bae, Kyungki-do, KR;
Seung Hyun Kim, Kyungki-do, KR;
Yul Kyo Chung, Kyungki-do, KR;
Won Hoon Song, Seoul, KR;
Sung Taek Lim, Incheon, KR;
Hyun Ju Jin, Seoul, KR;
Jun Hee Bae, Kyungki-do, KR;
Seung Hyun Kim, Kyungki-do, KR;
Yul Kyo Chung, Kyungki-do, KR;
Won Hoon Song, Seoul, KR;
Sung Taek Lim, Incheon, KR;
Hyun Ju Jin, Seoul, KR;
Samsung Electro-Mechanics Co., Ltd., Kyungki-Do, KR;
Abstract
Disclosed herein are a coating solution for the formation of a dielectric thin film and a method for the formation of a dielectric thin film using the coating solution. The coating solution comprises a titanium alkoxide, a β-diketone or its derivative, and a benzoic acid derivative having an electron donating group. The method comprises spin coating the coating solution on a substrate to form a thin film and drying the thin film at a low temperature to crystallize the thin film. The titanium-containing coating solution is highly stable. In addition, the coating solution enables formation of a thin film, regardless of the kind of substrates, and can be used to form dielectric thin films in an in-line mode in the production processes of PCBs.