The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Oct. 09, 2006
Michael G. Mcintyre, Austin, TX (US);
Zhuqing Zong, Round Rock, TX (US);
Andrew Drozda-freeman, Austin, TX (US);
Vijay Sankaran, Austin, TX (US);
Michael G. McIntyre, Austin, TX (US);
Zhuqing Zong, Round Rock, TX (US);
Andrew Drozda-Freeman, Austin, TX (US);
Vijay Sankaran, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method includes receiving a metrology report including metrology data collected by a metrology tool, position data associated with the metrology data, and context data associated with the metrology tool. A first coordinate system employed by the metrology tool is determined based on the context data. The position data is transformed from the first coordinate system to a second coordinate system to generate transformed position data. The transformed position data is associated with the metrology data.