The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Mar. 07, 2006
Applicant:
Yasuo Matsumiya, Kawasaki, JP;
Inventor:
Yasuo Matsumiya, Kawasaki, JP;
Assignee:
Fujitsu Microelectronics Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate inspection method includes forming, along a route extending from a peripheral portion to a central portion of an inspection area, a conducting path built up by combining a plurality of first conducting elements disposed in a first layer of a substrate, a plurality of second conducting elements disposed in a second layer of the substrate and contact holes connecting the first conducting elements and the second conducting elements between the first layer and the second layer, and detecting electrons emitted from the inspection area by irradiating the inspection area with electron beams.