The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Apr. 27, 2004
David Ziger, San Antonio, TX (US);
Steven Qian, Plano, TX (US);
David Ziger, San Antonio, TX (US);
Steven Qian, Plano, TX (US);
NXP B.V., Eindhoven, NL;
Abstract
In the manufacture of semiconductors, it is often necessary to characterize the effect of line width and line width shape on yield. In an example embodiment, there is a method () for randomizing exposure conditions across a substrate. The method comprises generating a list of random numbers (). A random number is mapped () to an exposure field, forming a list of random numbers and corresponding exposure fields. The list or random numbers and corresponding exposure fields is sorted () by random number. To each exposure field in the list sorted by random number, an exposure dose is assigned (). The list is sorted is sorted by exposure field ().