The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Nov. 18, 2005
Oliver Krause, Erlangen, DE;
Christoph Lehrer, Ashfeld, DE;
Silke Petersen, Nürnberg, DE;
NanoWorld AG, Neuchâtel, CH;
Abstract
An SPM sensor () for a scanning probe microscope with a cantilever (), a holding element () at one end of the cantilever () and a sensor tip () at the other end of the cantilever () and to a method for producing sensors of this type. The electron beam induced deposition (EBID or, shorter, EBD) structure () is anchored directly in the substrate of the sensor tip (). The anchoring of the EBD structure () takes place with positive and nonpositive engagement in a hole () in the sensor tip (), which is created by material removal in the substrate of the sensor tip (). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.