The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Oct. 17, 2007
Tiansheng Zhou, Edmonton, CA;
Tiansheng Zhou, Edmonton, CA;
Precisely Microtechnology Corp., Alberta, CA;
Adamant Kogoyo Co. Ltd., Tokyo, JP;
Abstract
A micro-electro-mechanical system (MEMS) micro mirror and a method of making the same. The micro mirror includes a body having a mirror support, opposed anchor s and flexible hinges which connect the mirror support to the anchor s. The mirror support has opposed comb edges with comb fingers. Electrodes, which have comb fingers to interact with the comb fingers of the mirror support, are spaced from the comb edges. The comb fingers along each of the comb edges of the mirror support surface are positioned on different horizontal planes from and the comb fingers on the electrodes so as to maximize electrostatic actuation.