The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7535552 B1

PDF
Full Text
Expired
Date of Patent:
May. 19, 2009

Filed:

Mar. 05, 2002
Applicant:

Shigeo Sakino, Kanagawa, JP;

Inventor:

Shigeo Sakino, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/62 (2006.01); G05G 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A moving apparatus including a first movable body which moves in a first direction in a horizontal plane, a second movable body arranged in a location different from a location of the first movable body in a vertical direction, which moves in a second direction intersecting with the first direction in the horizontal plane, a first linear motor which moves the first movable body in the first direction, a second linear motor which moves the second movable body in the second direction, a third movable body which is moved in the first direction and is moved in the second direction, a vacuum container which puts the first, second and third movable bodies in a vacuum, driving force transmission rods, and a sealing mechanism for sealing the driving force transmission rods and the vacuum container.


Find Patent Forward Citations

Sakino, Shigeo. (2009). Moving/guiding apparatus and exposure apparatus using the same (U.S. Patent No. 7535552). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7535552

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