The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Jun. 27, 2005
Manabu Tamura, Miyagi-ken, JP;
Takashi Hatanai, Miyagi-ken, JP;
Kazuhiro Soejima, Miyagi-ken, JP;
Koichi Takahashi, Miyagi-ken, JP;
Munemitsu Abe, Miyagi-ken, JP;
Shinji Murata, Miyagi-ken, JP;
Manabu Tamura, Miyagi-ken, JP;
Takashi Hatanai, Miyagi-ken, JP;
Kazuhiro Soejima, Miyagi-ken, JP;
Koichi Takahashi, Miyagi-ken, JP;
Munemitsu Abe, Miyagi-ken, JP;
Shinji Murata, Miyagi-ken, JP;
Alps Electric Co., Ltd., Tokyo, JP;
Abstract
A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The two island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.