The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Mar. 08, 2002
Billy D. Ables, Richardson, TX (US);
John C. Ehmke, Dallas, TX (US);
Roland W. Gooch, Dallas, TX (US);
Billy D. Ables, Richardson, TX (US);
John C. Ehmke, Dallas, TX (US);
Roland W. Gooch, Dallas, TX (US);
Raytheon Company, Waltham, MA (US);
Abstract
A hermetically sealed package includes a lid () hermetically bonded to a wafer or substrate (), with a chamber therebetween defined by a recess () in the lid. A circuit device () such as MEMS device is provided within the chamber on the substrate. A plurality of vias (-) are provided through the substrate, and each have a structure which facilitates a hermetic seal of a suitable level between opposite sides of the substrate. The vias provide electrical communication from externally of the assembly to the device disposed in the chamber.