The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Oct. 13, 2005
Applicants:
Alex Hong, Kaohsiung, TW;
I Yu Huang, Kaohsiung, TW;
Chih Hung Wang, Kaohsiung, TW;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a self-assembly microstructure with a polyimide thin-film elastic joint, which contains at least one stationary part of the microstructure and at least one movable part of the microstructure. An elastic joint located between the stationary part and the movable part is a photosensitive polyimide thin film material. The polyimide elastic joint is contracted after high-temperature reflow process. The surface tension force of cured polyimide can rotate and lift-up the movable part of the microstructure in completion of the self-assembly of the microstructure.