The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2009
Filed:
Apr. 06, 2006
Yasuo Yamaguchi, Chiyoda-ku, JP;
Makio Horikawa, Chiyoda-ku, JP;
Mika Okumura, Chiyoda-ku, JP;
Kimitoshi Satou, Chiyoda-ku, JP;
Yasuo Yamaguchi, Chiyoda-ku, JP;
Makio Horikawa, Chiyoda-ku, JP;
Mika Okumura, Chiyoda-ku, JP;
Kimitoshi Satou, Chiyoda-ku, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
In an electrostatic-capacitance-type acceleration sensor, water, etc. penetrating into a sealed space incorporating an acceleration detector having a movable electrode, and sticking of the movable electrodeto a capdue to static charge accumulated on the capduring the anodic bonding being performed are prevented. A conductive shielding filmthat can be extendedly transformed on the entire inner face of the capconstituting the sealed space is provided, which is not only extendedly arranged so as to be sandwiched between a bonding frameand the cap, but also electrically connected to the movable electrode; thereby, even if unevenness exists on the surface of the bonding frame, not only sufficient anodic bonding between the bonding frameand the capbecomes possible, but also the electric field due to the static charge accumulated in the capcan be shielded.