The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Mar. 27, 2006
Applicant:
Dominik Olligs, Dresden, DE;
Inventor:
Dominik Olligs, Dresden, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention in one of the embodiments refers to a method for forming an integrated memory device, the method including a forming a plurality of bitlines, wherein forming the plurality of bitlines includes forming diffusion lines in a substrate, forming an electrically conductive silicidation barrier layer on a substrate surface exposed, and depositing a conductive layer comprising a metal on the silicidation barrier layer.