The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2009
Filed:
Jun. 05, 2008
Applicants:
Raimund Mellies, Dieburg, DE;
Marc Boerner, Darmstadt, DE;
Lucia Arnóld, Muenster, DE;
Andrea Barko, Stockstadt, DE;
Rudolf Rhein, Heppenheim, DE;
Inventors:
Raimund Mellies, Dieburg, DE;
Marc Boerner, Darmstadt, DE;
Lucia Arnóld, Muenster, DE;
Andrea Barko, Stockstadt, DE;
Rudolf Rhein, Heppenheim, DE;
Assignee:
BASF SE, Ludwigshafen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); C25F 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
A composition for the production of semiconductors, comprising H2SiF6 and/or HBF4 in a total amount of 10-500 mg/kg, 1-17 % by weight of H2S04, 1-15% by weight of H202, optionally in combination with additives, in aqueous solution and a process of removing residual polymers using the composition.